| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a laminate having a patterned metal film excellent in adhesion and in insulation properties between patterned metal films capable of easily performing plasma etching treatment of a plated layer. <P>SOLUTION: A manufacturing method of a laminate having a patterned metal film comprises: a plated layer formation step (A) of forming a plated layer 12 on a substrate; a catalyst imparting step of imparting a plating catalyst or its precursor to the plated layer; a plating step (B) of performing plating 14; a pattern formation step (C) of forming a patterned metal film 16 using an etching liquid after the plating step; an acid solution contact step of bringing a substrate having the patterned metal film into contact with an acid solution; and a plated layer removal step (D) of removing a plated layer of a region 30 in which the patterned metal film is not formed by performing plasma etching treatment. <P>COPYRIGHT: (C)2013,JPO&INPIT |
