| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating liquid supply apparatus for a coating applicator, which has a function of removing a gas existing or dissolved in the liquid which can cause a coating quality failure. <P>SOLUTION: The apparatus includes: a casing member internally having a liquid contact portion that is a space for storing a coating liquid needed for coating; a piston member reciprocating inside the casing member to supply the coating liquid in the liquid contact portion; and a thin film which divides the inside of the casing member into the liquid contact portion and a non-liquid contact portion that is a space free from the contact of the coating liquid, in which the coating liquid in the liquid contact portion is supplied by pushing the coating liquid by the piston member. The atmosphere of the non-liquid contact portion isolated by the thin film is in a pressure-reduced state lower than the atmospheric pressure. <P>COPYRIGHT: (C)2013,JPO&INPIT |
