THIN FILM MANUFACTURING APPARATUS AND METHOD FOR SOLAR CELL

摘要

PURPOSE: An apparatus and method for manufacturing a thin film for a solar cell are provided to reduce process time by simultaneously depositing and crystallizing selenium. CONSTITUTION: A chamber(210) includes an inner receiving space and includes a gate for inputting and outputting a substrate. A heating member(220) is located on the lower side of the chamber. A transfer device is arranged along the upper side of the heating member and has a substrate loading space on the upper side thereof. A cracker cell(240) is connected to the upper side of the chamber and sprays cracked selenium molecules to the inside of the chamber. A lamp unit(250) is installed on the upper side of the chamber.