发明名称 |
CAPACITIVE SENSOR HAVING CYCLIC AND ABSOLUTE ELECTRODE SETS |
摘要 |
A capacitive sensor includes first and second variable capacitor electrode sets, respectively disposed upon a planar support surface and a proof mass that is compliantly displaceable along a first axis substantially parallel to the planar support surface. The first electrode set produces a cyclic variation in capacitance over a range of displacement of the proof mass along the first axis, and the second electrode set produces an absolute capacitance variation throughout the range of displacement along the first axis. |
申请公布号 |
EP2257821(B1) |
申请公布日期 |
2012.10.24 |
申请号 |
EP20080732855 |
申请日期 |
2008.03.26 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
HARTWELL, PETER GEORGE;WALMSLEY, ROBERT G |
分类号 |
G01P3/483;G01D5/241;G01P15/125;G01P15/18 |
主分类号 |
G01P3/483 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|