发明名称 |
Mass spectrometer |
摘要 |
A mass spectrometer having a resolution improved by introducing ions into a mass spectrometry part (7) with a high efficiency is provided with a small-sized, simple configuration. The mass spectrometer includes an opening/closing mechanism (4) provided between a sample introducing piping part (2, 41) for introducing a sample into the mass spectrometry part (7) and the mass spectrometry part (7) to conduct gas introduction intermittently and control sample passage. The mass spectrometer further includes a pump mechanism (10) to evacuate a high pressure side of the sample introducing piping part (2, 41), that is, an opposite side of the opening/closing mechanism (4) to the mass spectrometry part (7) to have a pressure in a range of 100 to 10,000 Pa. |
申请公布号 |
EP2378539(A3) |
申请公布日期 |
2012.10.24 |
申请号 |
EP20110003200 |
申请日期 |
2011.04.15 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
HASHIMOTO, YUICHIRO;HASEGAWA, HIDEKI;SUGIYAMA, MASUYUKI;MOROKUMA, HIDETOSHI |
分类号 |
H01J49/04;H01J49/00;H01J49/24 |
主分类号 |
H01J49/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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