发明名称 |
System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool |
摘要 |
A method, system and computer readable medium for analyzing a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is performed using the input data and the physical model to provide a first principles simulation result; and the first principles simulation result is used to determine a fault in the process performed by the semiconductor processing tool. |
申请公布号 |
US8296687(B2) |
申请公布日期 |
2012.10.23 |
申请号 |
US20030673506 |
申请日期 |
2003.09.30 |
申请人 |
STRANG ERIC J.;MITROVIC ANDREJ;TOKYO ELECTRON LIMITED |
发明人 |
STRANG ERIC J.;MITROVIC ANDREJ |
分类号 |
G06F17/50;G06F19/00;H01L |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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