发明名称 |
Substrate storage container |
摘要 |
A container includes: a container body for storing substrates of semiconductor wafers; a door element detachably fitted to an open front portion of the container body; and a compressively deformable gasket for sealing between the container body and the door element. While a sealing surface for the gasket is formed on an inner periphery of an open front portion of the container body so that the difference between the maximum and minimum of a flatness is less than 0.50 mm, a fitting portion for the gasket is formed in a frame shape. The gasket is formed of a base fitted to the fitting portion; a flexible sealing part extended from the base toward the sealing surface; and a contact portion that is curvedly formed at a distal end of the sealing part and put in press-contact with the sealing surface. |
申请公布号 |
US8292081(B2) |
申请公布日期 |
2012.10.23 |
申请号 |
US20070301123 |
申请日期 |
2007.05.21 |
申请人 |
SASAKI SHIGENOBU;OHORI SHINICHI;YAMAGISHI HIROKI;SHIN-ETSU POLYMER CO., LTD. |
发明人 |
SASAKI SHIGENOBU;OHORI SHINICHI;YAMAGISHI HIROKI |
分类号 |
B65D85/90 |
主分类号 |
B65D85/90 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|