发明名称 SOLID STATE IMAGE PICKUP DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To inhibit characteristic deterioration of a solid state image pickup device. <P>SOLUTION: A solid state image pickup device of the present embodiment comprises: a photoelectric conversion element 5 provided in a pixel formation region in a semiconductor substrate 10; an insulation film 41 formed on the semiconductor substrate 10 and on the photoelectric conversion element 5 and including at least one salient 4 above the photoelectric element; a wiring layer 31 provided on the insulation film 41; and an insulation film 42 provided on the insulation film 41 and on the wiring layer 31 and including an uneven part 6 having a tilt angle so as to correspond with the salient 4. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012204686(A) 申请公布日期 2012.10.22
申请号 JP20110068910 申请日期 2011.03.25
申请人 TOSHIBA CORP 发明人 KAWAGUCHI TAMOTSU
分类号 H01L27/14;H01L27/148 主分类号 H01L27/14
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