| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating device capable of reducing variations in thickness of a coated film. <P>SOLUTION: A coating device 1 includes: a resist feeding plate 8 to be filled with photoresist 15; a pumping roll 9 for making the photoresist being attached onto the peripheral surface and pumping up the same; a coating roll 11 for transferring the photoresist transferred onto the peripheral surface onto a flexible tape 13; a backup roll 13 for supporting the flexible tape 13; a viscosity measurement device 6 for measuring the viscosity of the photoresist; and a controller 7 for controlling the rotation of the coating roll 11 so as to change the rotation speed of the coating roll 11 relative to the state where the viscosity measurement value is within a viscosity range, when the viscosity measurement value measured by the viscosity measurement device 6 falls out of a predetermined viscosity range. <P>COPYRIGHT: (C)2013,JPO&INPIT |
