| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce power consumption by supplying a medium, which is warmed after being used for cooling, into a furnace, and also to enable setting of a desired profile. <P>SOLUTION: A reflow furnace is configured such that a plurality of furnace bodies are arranged in series along a conveyance path of a heating object and at least part thereof is covered with a heat insulating material. From an inlet side to an outlet side of the conveyance path, a preheating section, a reflow section and a cooling section are arranged in this order. A medium having been used for cooling, for example, nitrogen gas is supplied to the furnace bodies included in the reflow section. Piping is provided in a zone in the preheating section adjacent to the reflow section, and the zone is cooled by the medium supplied into the piping. <P>COPYRIGHT: (C)2013,JPO&INPIT |
