| 摘要 |
<P>PROBLEM TO BE SOLVED: To continuously atomize a plurality of kinds of liquids while preventing the contamination of a plurality of liquids. <P>SOLUTION: The ultrasonic atomizing device using surface acoustic wave device is provided with a piezoelectric base body 11 having a groove like part, a plurality of comb-shaped electrodes 21-25 formed in a place facing a direction interposing a groove like part of the upper surface of the base body and the groove like part and each generating the surface acoustic wave and a plurality of liquid droplet devices 31-33 for dropping the droplets on a propagation path of the surface acoustic wave generated in each comb-shaped electrode. The liquid to be atomized is dropped from the liquid dropping devices 22-25 corresponding to at least one comb-shaped electrode to be atomized by the surface acoustic wave. After the atomization of the liquid, a cleaning liquid is dropped from the liquid dropping device 21 corresponding at least to one comb-shaped electrode to be atomized or fluidized by the surface acoustic wave, being discharged to the outside along the groove-like part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
