发明名称 SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor substrate that is suitable for manufacturing a hall element having a p-type carrier with sufficient sensitivity. <P>SOLUTION: A semiconductor substrate comprises: a base substrate whose entire or partial surface is a silicon crystal surface; a blocking body that is located on the base substrate, has an opening reaching the silicon crystal surface, and blocks the growth of the crystal; a first crystal layer that is located on the silicon crystal surface at the bottom of the opening; a pair of first metal layers that are located on the first crystal layer and are disposed apart from each other; and a pair of second metal layers that are located on the first crystal layer and are disposed apart from each other. The first shortest line connecting each of the pair of first metal layers and the second shortest line connecting each of the pair of second metal layers are in a crossing relation or a skew relation to each other. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012199524(A) 申请公布日期 2012.10.18
申请号 JP20120042591 申请日期 2012.02.28
申请人 SUMITOMO CHEMICAL CO LTD;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 HIROYAMA YUICHI;YAMANAKA SADANORI;HATA MASAHIKO;ITAYA TARO;MAEDA TATSURO
分类号 H01L43/06;H01L21/331;H01L21/338;H01L21/8234;H01L21/8238;H01L27/06;H01L27/092;H01L29/737;H01L29/778;H01L29/812 主分类号 H01L43/06
代理机构 代理人
主权项
地址