| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an illumination optical device capable of achieving the lighting conditions that are rich in diversity for the shape, size and polarization state of illumination pupil luminance distribution. <P>SOLUTION: The illumination optical device comprises an optical unit 3. The optical unit 3 includes a light beam splitter 35 which splits an incident light beam into two light beams, a first spatial light modulator 33 which can be arranged in the optical path of a first light beam, a second spatial light modulator 34 which can be arranged in the optical path of a second light beam, and a photosynthesizer 36 which synthesizes a light beam passed through the first spatial light modulator and a light beam passed through the second spatial light modulator. The first spatial light modulator and the second spatial light modulator have multiple optical elements 33a, 34a arranged two-dimensionally and controlled individually. <P>COPYRIGHT: (C)2013,JPO&INPIT |
