| 摘要 |
An encoder includes a scale that includes a pattern row, a detector array, and a signal processor. The pattern row has a plurality of different modulation periods in the moving direction, an amplitude of the energy distribution in the pattern having at least one modulation period being configured to change with a position of the scale in the moving direction. The signal processor acquirers an amplitude of an energy distribution of a corresponding modulation period based on an output signal from the detector array, and an amplitude signal obtained by normalizing a plurality of amplitudes obtained by the plurality of amplitude acquirers, the amplitude signal serving as a position signal representative of the position of the scale. |
