发明名称 |
DEPOSITION APPARATUS AND DEPOSITION METHOD |
摘要 |
A deposition apparatus 50 forms a thin film 3 in a predetermined pattern on a substrate 10 for an organic EL display. A first correction plate 81 and a second correction plate 82 are placed between a shadow mask 60 and a deposition source 53 that emits deposition particles. Each of the correction plates 81, 82 has a plurality of blade plates 83 and a frame 84 that supports the plurality of blade plates 83. The blade plates 83 are placed so as to be tilted with respect to the shadow mask 60, and to extend parallel to each other with an opening 86 between adjoining ones of the blade plates 83 as viewed in a direction perpendicular the deposition mask 60. |
申请公布号 |
KR20120115583(A) |
申请公布日期 |
2012.10.18 |
申请号 |
KR20127023856 |
申请日期 |
2011.02.10 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
SONODA TOHRU;HAYASHI NOBUHIRO;KAWATO SHINICHI;INOUE SATOSHI |
分类号 |
C23C14/24;C23C14/04;H01L51/50;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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