| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer device which can transport even a lot with a small number of substrates efficiently, and can make the interval of each substrate uniform even if a substrate is missing in the lot. <P>SOLUTION: The substrate transfer device includes support arms 17 the number of which is smaller than that of substrates W that can be housed in an FOUP but greater than one. By means of three support arms 17, three substrates housed in FOUP at unequal intervals are transported at once to a position conversion section, and the interval of three substrates can be made constant. Consequently, even a small number of substrates can be transported efficiently by a plurality of support arms 17. Furthermore, processing in a processing section can be made uniform for three substrates. <P>COPYRIGHT: (C)2013,JPO&INPIT |
