| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature/humidity control device for giving the temperature and humidity that suit an actual expansion and contraction behavior of a general-purpose film base material, by monitoring the expansion and contraction behavior of the general-purpose film base material, and feeding back the results to the humidity control mechanism. <P>SOLUTION: The temperature/humidity control device stores a general-purpose film base material or the like with a high precision and without coming out of the range of management criterion thanks to capability of the management and control of the expansion and contraction behavior due to temperature and humidity of the base material in accordance with actual position change information. Here, a used resin of a substrate on which a specific pattern is patterned and a resin of a substrate stored in a buffer, are resins of the same kind. <P>COPYRIGHT: (C)2013,JPO&INPIT |
