A thermopile sensor array is provided. The thermopile sensor array may include multiple pixels formed by multiple thermopiles arranged on a single common shared support membrane. A separation between the edge of the shared support membrane and the outermost thermopile(s) may be included to provide additional thermal isolation between the thermopile and an underlying silicon substrate.
申请公布号
WO2012140521(A2)
申请公布日期
2012.10.18
申请号
WO2012IB01093
申请日期
2012.04.13
申请人
EXCELITAS TECHNOLOGIES GMBH & CO KG;BARLOW, ARTHUR, J.;KARAGOEZOGLU, HERMANN;JU, JIN, HAN;PLOTZ, FRED;MARINESCU, RADU, M.
发明人
BARLOW, ARTHUR, J.;KARAGOEZOGLU, HERMANN;JU, JIN, HAN;PLOTZ, FRED;MARINESCU, RADU, M.