| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating apparatus which prevents an inkjet ejection part from thermally expanding, and keeps a temperature distribution even without contaminating the atmosphere of the coating apparatus with particles. <P>SOLUTION: The apparatus comprises a stage on which a substrate is placed, an ejection part 30 which ejects a coating liquid by an inkjet system, a cooling mechanism which cools the ejection part. The ejection part ejects the coating liquid from an inkjet head 50 of the ejection part while moving relatively to the substrate on the stage to form a coated film on the substrate. The cooling mechanism has at least a cooling water-supplying device 41, and a flexible tube 44, wherein cooling water is circulated to the flexible tube of the coating unit from the cooling water-supplying device to cool the ejection part, thereby cooling the cooling apparatus without generating particles. <P>COPYRIGHT: (C)2013,JPO&INPIT |
