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发明名称
Displacement information detecting apparatus
摘要
申请公布号
EP0889303(B2)
申请公布日期
2012.10.17
申请号
EP19980111971
申请日期
1998.06.29
申请人
CANON KABUSHIKI KAISHA
发明人
TAKAYAMA, MANABU;IGAKI, MASAHIKO
分类号
G01D5/38
主分类号
G01D5/38
代理机构
代理人
主权项
地址
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