| 摘要 |
A method of manufacturing a piezoelectric actuator includes a first step of providing, on an insulating layer, a first electrode which has a recess formed on a surface of the first electrode; a second step of forming a piezoelectric layer on the surface of the first electrode; and a third step of forming a second electrode on a surface of the piezoelectric layer. Since a part of the piezoelectric layer enters into the recess, the piezoelectric layer is constrained by the first electrode. Therefore, the piezoelectric layer hardly exfoliates from the first electrode, and the adhesion between the piezoelectric layer and the first electrode is improved. Consequently, the durability of the piezoelectric actuator is improved.
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