Micromechanical component with reinforced flanks

摘要

The micromechanical component (2) has upper and lower faces (2.5,2.6) and side faces (2.3,2.4), whose entire area is provided with coating (6) of micro-or nano-crystalline diamond and/or diamond-like carbon (DLC). The thickness of coating over a portion of side face is smaller than thickness of top face and bottom face, so as to define a reinforced area in reference to side face. The thickness of coating is set to 0.5-50 mu m. The side face coating thickness that is normalized on one or both of the upper face and bottom faces is varied by 100%. An independent claim is included for method for manufacturing micromechanical component, which involves providing a carrier material consisting of substrate plate made of silicon. The substrate is patterned to form a gap. The nucleation of carrier material is performed with carbonaceous starting materials for the formation of diamond nuclei and diamond is produced by chemical vapor deposition (CVD).