发明名称 FILTER FOR WAFER CARRIER
摘要 PURPOSE: A filter for a wafer carrier is provided to improve filtering efficiency of a micro particle by extending both sides of a filter receiving part as dissymmetric shape and securing a sufficient airway and sufficient filter receiving part. CONSTITUTION: A receiving space is formed inside a body in order to accept wafers. A cover(20) closes an opening of the body in order to safely carry and store the wafers. A protrusion forms an airway in order to be connected to the inside the body. A filter(30) filters moisture and micro particles within 0.3 to 0.1micrometers in the air. Filter housing forms a ventilation pipe portion at one side of a filter receiving part.
申请公布号 KR20120114866(A) 申请公布日期 2012.10.17
申请号 KR20110032672 申请日期 2011.04.08
申请人 3S KOREA CO., LTD.;OCEAN BIO 发明人 PARK, JONG IK;PARK, JOUNG WOO;PARK, JONG LARK
分类号 H01L21/673;B01D39/00;B65D85/38;B65D85/86 主分类号 H01L21/673
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