PLANE EMISSION LASER ELEMENT, PLANE EMISSION LASER ARRAY, AND MANUFACTURING METHOD, OPTICAL SCANNER AND IMAGE FORMATION APPARATUS USING THE SAME, AND OPTICAL TRANSCEIVER MODULE, OPTICAL COMMUNICATION DEVICE, AND ELECTRICAL APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a high quality plane emission laser by enhancing the yield in the manufacturing process.

SOLUTION: The plane emission laser element 1 has a semiconductor layer 1e containing aluminum consisting of a first semiconductor multilayer film (a lower semiconductor DBR1b), an active layer 1c, and a second semiconductor multilayer film (an upper semiconductor DBR1d) on a substrate 1a composed of a material not containing aluminum. A first isolation trench 1f is formed by etching the semiconductor layer 1e to a depth reaching the substrate 1a, a protective film 1g is formed on the semiconductor layer 1e, a second isolation trench 1i is formed by etching the substrate 1a in the center of the first isolation trench 1f down to a predetermined depth, and then the semiconductor layer 1e is separated along the second isolation trench 1i.

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