| 摘要 |
There is provided a loading unit which can avoid the need to enhance the performance of a lifting elevator mechanism, thus preventing an increase in the cost of the lifting elevator mechanism. The loading unit is configured to vertically move a substrate holder 56, holding a plurality of substrates W, into and out of a cylindrical processing container 46 upon heat treatment of the substrates W. The loading unit includes: a lifting elevator mechanism 66 for holding and vertically moving the substrate holder 56 and a cap 62; and a pressing mechanism 86, having a piezoelectric actuator 88, for upwardly pressing against the cap 62 lying at a bottom opening 44 of the processing container 46. |
