| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a relief pattern recorded in a solidified polymeric material from being distorted during separation of an imprint template from a substrate, by resolving issues, so-called release characteristics, that first the solidified polymeric material ought to adhere well to a transfer layer on the substrate, and second, it ought to be easily released from a surface of the imprint template. <P>SOLUTION: An imprinting material contains a fluorinated surfactant, a photoinitiator, and a monomer selected from a monomer group consisting of acrylates and methacrylates. <P>COPYRIGHT: (C)2013,JPO&INPIT |
