| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plate-like body polishing apparatus that can improve the productivity of a plate-like body. <P>SOLUTION: A glass plate G is stuck to a suction sheet 39 stuck to a back plate 38 of a canvas 14 in a stage 16. The canvas 14 is then conveyed to a stage 18 and horizontally held to a carrier 52. The canvas 14 and polishing pads 58, 60 are relatively brought in proximity to press the glass plate G to the polishing pads 58, 60 by the pressure of compressed air, and the canvas 14 and the polishing pads 58, 60 are relatively moved along the polished surface of the glass plate G to polish the polished surface of the glass plate G. The glass plate G is thus polished using the canvas 14 without using a film body. A replacement process of the film body can thereby be eliminated from the production process of the glass plate G. <P>COPYRIGHT: (C)2013,JPO&INPIT |
