| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an evaluation apparatus for adsorptivity and/or reactivity of gas, in which the adsorptivity and/or reactivity of gas in an evaluation target can be evaluated even when a high-concentration gas is used. <P>SOLUTION: An evaluation apparatus comprises a reaction unit 1 within which an evaluation target is provided, a heating unit 2 which heats the evaluation target, a gas supply channel 3 which allows gas to flow into the reaction unit 1, a gas discharge channel 4 which allows the gas to flow out of the reaction unit 1, a flow rate adjusting unit 5 which is provided inside the gas supply channel 3, and a detection unit 7 which is provided in the gas discharge channel 4. An analysis unit 8 which analyzes adsorptivity and/or reactivity of the gas in the evaluation target is connected to the detection unit 7 and the reaction unit 1, an inert gas injection unit 9 which injects an inert gas into the gas discharge channel 4 is provided in the gas discharge channel 4, and the detection unit 7 detects a component contained in a mixed gas of the gas flowing out of the reaction unit 1 and the inert gas. <P>COPYRIGHT: (C)2013,JPO&INPIT |
