发明名称 |
SELECTIVE CRYSTALLIZATION METHOD AND LASER CRYSTALLIZATION APPARATUS FOR THEREOF |
摘要 |
<p>PURPOSE: A selective crystallization method and a laser crystallization device for the same are provided to improve productivity of a crystallization process by crystallizing two substrates at the same time during the same process. CONSTITUTION: A first substrate(10) is separated from a second substrate(20) at a predetermined distance. The first substrate comprises a first crystallization region(11). The second substrate comprises a second crystallization region(21). The first crystallization region and the second crystallization region are alternately arranged. The first crystallization region and the second crystallization region are irradiated with a laser beam. The first crystallization region and the second crystallization region are alternately crystallized.</p> |
申请公布号 |
KR20120111759(A) |
申请公布日期 |
2012.10.11 |
申请号 |
KR20110026984 |
申请日期 |
2011.03.25 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
KIM, DO YOUNG;LEE, JUNE WOO;LEE, WON KYU |
分类号 |
H01L21/268;H01L21/324;H01L29/786 |
主分类号 |
H01L21/268 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|