发明名称 SELECTIVE CRYSTALLIZATION METHOD AND LASER CRYSTALLIZATION APPARATUS FOR THEREOF
摘要 <p>PURPOSE: A selective crystallization method and a laser crystallization device for the same are provided to improve productivity of a crystallization process by crystallizing two substrates at the same time during the same process. CONSTITUTION: A first substrate(10) is separated from a second substrate(20) at a predetermined distance. The first substrate comprises a first crystallization region(11). The second substrate comprises a second crystallization region(21). The first crystallization region and the second crystallization region are alternately arranged. The first crystallization region and the second crystallization region are irradiated with a laser beam. The first crystallization region and the second crystallization region are alternately crystallized.</p>
申请公布号 KR20120111759(A) 申请公布日期 2012.10.11
申请号 KR20110026984 申请日期 2011.03.25
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KIM, DO YOUNG;LEE, JUNE WOO;LEE, WON KYU
分类号 H01L21/268;H01L21/324;H01L29/786 主分类号 H01L21/268
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