| 摘要 |
PURPOSE: A process control method is provided to prevent the loss of processing yield by eliminating uncertainty of location, movement, and slope of an individual die. CONSTITUTION: Images of a first set of dies are obtained(510). The images of the first set are processed in order to detect defects(520). A correction motion is processed to react to the detected defects by processing the images of the first set(530). Images of a second set of the dies are obtained(540). The images of the second set are processed in order to detect defects(550). A correction motion is processed to react to detected defects by processing the images of the second set(560). [Reference numerals] (510) Images of a first set of dies are obtained after finishing a first manufacturing step of a manufacturing process of a fan-out wafer; (520) The images of the first set are processed in order to detect defects; (530) A correction motion is processed to react to the detected defects by processing the images of the first set; (540) Images of a second set of the dies are obtained after finishing a second manufacturing step of the manufacturing process of the fan-out wafer(The second manufacturing process follows the first manufacturing process); (550) The images of the second set are processed in order to detect defects; (560) A correction motion is processed to react to detected defects by processing the images of the second set; (570) Images of a third set of the dies are obtained after finishing a third manufacturing step of the manufacturing process of the fan-out wafer(The third manufacturing process follows the first manufacturing process); (580) The images of the third set are processed in order to detect defects; (590) A correction motion is processed to react to detected defects by processing the images of the third set; (600) Images of a third set of the dies are obtained after finishing a fourth manufacturing step of the manufacturing process of the fan-out wafer(The fourth manufacturing process follows the first manufacturing process); (610) The images of the fourth set are processed in order to detect defects; (620) A correction motion is processed to react to detected defects by processing the images of the fourth set |
