| 摘要 |
PURPOSE: An apparatus for grinding a substrate and a grinding method are provided to prevent the interference of a grinding table or post in a process that a grinding wheel contacts with an edge. CONSTITUTION: An apparatus(100) for grinding a substrate comprises a first grinding unit(130), a second grinding unit(140), a first transfer unit(110), and a second transfer unit(120). The first and second grinding units are respectively placed in first and second grinding areas, and grind the upper and lower edges of the substrate. The first transfer unit loads the substrate on a loading area(A1), and transfers the substrate to a buffer area(A3). The second transfer unit receives the substrate from the first transfer unit, and transfers the substrate to an unloading area(A5). |
