发明名称 DEVICE AND METHOD FOR MICROSTRUCTURED PLASMA TREATMENT
摘要 The invention relates to a device for the microstructured plasma treatment of a film substrate, especially of a plastic film Said device comprises a rotatably received cylindrical electrode the surface of which contains or consists of metal, especially chromium, the surface having microstructured depressions, a planar high-voltage electrode the surface of which has a shape complementary to that of the cylindrical electrode and can be arranged on a section of the surface of the cylindrical electrode in a substantially form-fit manner, a transport device for transporting the film substrate to be treated between the surface of the cylindrical electrode and the high-voltage electrode, and a device for feeding a process gas to the surface of the cylindrical electrode and to the interspace between the cylindrical electrode and the high-voltage electrode.
申请公布号 KR101188677(B1) 申请公布日期 2012.10.08
申请号 KR20107028799 申请日期 2009.06.09
申请人 发明人
分类号 H05H1/24 主分类号 H05H1/24
代理机构 代理人
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