Substrate Transfering Apparatus for Chamber System and Chamber System thereof,申请号KR20090130016-传众专利搜索

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发明名称	Substrate Transfering Apparatus for Chamber System and Chamber System thereof
摘要
申请公布号	KR101188863(B1)	申请公布日期	2012.10.08
申请号	KR20090130016	申请日期	2009.12.23
申请人		发明人
分类号	H01L21/677;G02F1/13;H01L21/203	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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