| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a gas barrier thin film having high adhesiveness (especially water resistance) to a plastic molding, on a surface of a plastic molding using a heating element chemical vapor deposition (CVD) method. <P>SOLUTION: The method for producing a gas barrier plastic molding 90 forms the gas barrier thin film 92 containing Al and O as a constituent element, on the surface of the plastic molding 91 by the heating element CVD method. The method for producing a gas barrier plastic molding includes: a hydrotreating step of feeding a hydrogen gas into a vacuum chamber 6 accommodating the plastic molding to reduce the surface of the plastic molding; and a film forming step of feeding an Al source gas and bringing the Al source gas into contact with the heat-emitting heating element to decompose the Al source gas, wherein chemical species are generated, and bringing the chemical species into contact with the surface of the plastic molding, thereby forming the gas barrier thin film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
