| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration-proof control device for performing the highly accurate correction of parallel vibration. <P>SOLUTION: This optical equipment includes: first vibration detection means 4807p for detecting the angular speed of vibration; second vibration detection means 101p for detecting vibration by a system which is different from that of the first vibration detection means; arithmetic means 308 for calculating a correction value from a first signal based on the output of the first vibration detection means and a second signal based on the output of the second vibration detection means; output correction means 309 for correcting the output from the first vibration detection means by using the correction value; first vibration-proof control means 301 and 303 for making vibration correction driving means 4809 drive vibration correction means 4806 on the basis of the output of the first vibration detection means; second vibration-proof control means 310, 311, and 309 for making the vibration correction driving means drive the vibration correction means on the basis of the output of the first vibration detection means corrected by the output correction means; and frequency band changing means 311 for making the frequency characteristics of the second vibration-proof control means different from the frequency characteristics of the first vibration-proof control means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
