METHOD AND SYSTEM FOR SHAPING A CMUT MEMBRANE

摘要

The present disclosure is directed at a method and system for shaping a membrane a capacitive micromachined ultrasonic transducer, or CMUT. A bias voltage is asymmetrically applied to a membrane of the CMUT such that the membrane is directed to send ultrasonic waves that propagate along a propagation axis that is not parallel with a propagation axis along which ultrasonic waves propagate when the bias voltage is symmetrically applied to the membrane. In this way, the ultrasonic waves that are generated using a CMUT array can be physically steered to or focused on a target. Steering and focusing ultrasonic waves by altering the shape of the membrane by asymmetrically biasing the membrane reduces grating lobes and can also be used as part of an adaptive control system that can improve ultrasound image quality.