| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprint mold suitable for micro patterning, a production method therefor, and a patterned body produced using an imprint mold. <P>SOLUTION: In the imprint mold, a region where an uneven pattern is formed is formed into a mesa structure higher than the surrounding surface. In the production method of the imprint mold, the outermost periphery of a patterned region is set on the outside of the outermost periphery of a desired pattern region by 2 μm or more. The patterned body is formed by transferring the uneven pattern of the imprint mold to the transferred layer on a substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
