发明名称 METHOD AND DEVICE FOR FORMING PATTERN
摘要 <P>PROBLEM TO BE SOLVED: To provide a device and method for forming a pattern that can form a favorable pattern according to a predetermined pattern formation planned portion. <P>SOLUTION: The method for forming a pattern includes: a surface treatment step of applying a liquid repellent coating material around a pattern formation planned portion on a target object by an inkjet method; and a pattern forming step of applying, after the surface treatment step, a pattern forming material to the pattern formation planned portion on the target object by an inkjet method. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012187539(A) 申请公布日期 2012.10.04
申请号 JP20110054339 申请日期 2011.03.11
申请人 TOSHIBA CORP 发明人 FUCHIGAMI YASUHIKO
分类号 B05D1/26;B05C5/00;B05D1/32;H01L21/288 主分类号 B05D1/26
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