| 发明名称 |
LASER APPARATUS, METHOD FOR GENERATING LASER BEAM, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM |
| 摘要 |
A laser apparatus for generating extreme ultraviolet (EUV) light at a wavelength of approximately 13 nm is provided. The laser apparatus may be combined with a reduced projection reflective optical system. Systems and methods for generating EUV light are also provided.
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| 申请公布号 |
WO2012131455(A1) |
申请公布日期 |
2012.10.04 |
| 申请号 |
WO2012IB00443 |
申请日期 |
2012.03.08 |
| 申请人 |
GIGAPHOTON INC.;WAKABAYASHI, OSAMU |
发明人 |
WAKABAYASHI, OSAMU |
| 分类号 |
H01S3/00;H01S3/13;H01S3/134;H01S3/23 |
主分类号 |
H01S3/00 |
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