Micromechanical optical component e.g. micro mirror actuator device has lever elements that are connected to piezoelectric element such that voltage is applied to piezoelectric element and lever elements are moved to move mirror element

摘要

The micromechanical optical component (1) comprises a piezoelectric element (2) to which voltage is applied, and lever elements (3,4) which are connected together at one end. The lever element is coupled with a mirror element (14). The lever elements are connected with the piezoelectric element such that voltage is applied to the piezoelectric element and the lever elements are moved for moving the mirror element. An independent claim is included for manufacturing method of micromechanical component.