| 摘要 |
<p>To improve adhesive strength of a polymethylmethacrylate (PMMA) film. In this film surface treatment method, a first reaction gas containing an acrylic acid is blown out from a first reaction gas nozzle (23), and is brought into contact with the PMMA film (first contact step). Then, in a gap (14) between a first roll electrode (11) and a second roll electrode (12), the PMMA film is irradiated with argon plasma (first irradiation step). Then, a second reaction gas containing the acrylic acid is blown out from a second reaction gas nozzle (43), and is brought into contact with the PMMA film (second contact step). Then, in a gap (15) between the second roll electrode (12) and a third roll electrode (13), the PMMA film is irradiated with the argon plasma (second irradiation step).</p> |
