发明名称 IMAGING APPARATUS AND IMAGING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an imaging apparatus using a Talbot interference method and capable of changing relative positions of an interference pattern and a screen grid more easily as compared with a conventional apparatus. <P>SOLUTION: An imaging apparatus 1 includes: a diffraction grating 310 for forming an interference pattern 810 in which dark parts and bright parts are aligned in an array direction by diffracting light from a light source; an optical unit 710 arranged in an optical path between the light source and a detector 510; and the detector 510 for detecting light passed through the diffraction grating 310. The optical unit 710 can change the direction of an optical axis of light emitted from the optical unit 710 so that the relative positions of the interference pattern 810 and the detector 510 are changed in the array directions, and the detector 510 detects light correspondingly to a change in the relative positions of the interference pattern 810 and the detector 510. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012189446(A) 申请公布日期 2012.10.04
申请号 JP20110053169 申请日期 2011.03.10
申请人 CANON INC 发明人 NAGAI KENTARO
分类号 G01N23/04;G02B5/18 主分类号 G01N23/04
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