| 摘要 |
An object of the present invention is to provide a downsized ozone generation unit including control means having plurality of means for outputting an ozone gas, and the ozone generation unit. In the present invention, a gas pipe integrated block (30) has a plurality of internal pipe paths (R30a to R30f). The plurality of internal pipe paths are connected to an ozone generator (1), control means (an MFC (3), a gas filter (51), and an APC (4)), a raw gas supply port (14), an ozone gas output port (15), and cooling water inlet/outlet ports (13A, 13B), to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through the APC to the ozone gas generator. The ozone gas output pipe path extends from the ozone generator through the gas filter, the ozone concentration meter 5, and the MFC 3, to the ozone gas output port. |
