| 摘要 |
PURPOSE: A wafer manufacturing apparatus is provided to prevent a pin halo phenomenon on a wafer around a lift pin by loading or unloading a wafer on a susceptor through the vertical movement of a lift assembly after the lift assembly receives an edge part of the wafer. CONSTITUTION: A gas inlet and a gas outlet are arranged in a chamber. A susceptor(130) is arranged in the chamber and loads or unloads a wafer(120). A wafer support stand(140a) receives the wafer. A lift arm(140b) loads or unloads the wafer on the susceptor.
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