发明名称 Substrate for the epitaxial growth of gallium nitride
摘要 The subject of the invention is a substrate that can be used as a substrate for the epitaxial growth of layers based on gallium nitride and comprising a support material (11, 21) coated on at least one of its faces with at least one multilayered stack comprising at least one zinc-oxide-based layer (13, 24). The substrate is coated with a semiconductor structure of III-N or II-VI type, and it is characterized in that placed between the support material (11, 21) and said at least one zinc-oxide-based layer (13, 24) is at least one intermediate layer (12, 23) comprising oxides with at least two elements chosen from tin (Sn), zinc (Zn), indium (In), gallium (Ga) and antimony (Sb).
申请公布号 US8278656(B2) 申请公布日期 2012.10.02
申请号 US20080668676 申请日期 2008.07.11
申请人 MATTMANN ERIC;REUTLER PASCAL;LIENHART FABIEN;SAINT-GOBAIN GLASS FRANCE 发明人 MATTMANN ERIC;REUTLER PASCAL;LIENHART FABIEN
分类号 H01L29/12;H01L29/22;H01L31/0256;H01L31/0296 主分类号 H01L29/12
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