| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dressing device that can accurately determine a period of time during which dressing is performed. <P>SOLUTION: The dressing device DA includes: a dressing tool 1; and a servomotor 21 which rotation-drives the dressing tool 1. The dressing device, in which the dressing tool 1 is rotated in a dressing surface 2 so that a polishing pad 15 abutted to the dressing surface 2 of the dressing tool 1 is dressed, also includes: a torque measuring device 35 which measures a rotational drive torque of the servomotor 21; and a controller 30 which measures a period of time during which the dressing surface 2 is abutted to a polishing surface 16 based on the rotational drive torque of the servomotor 21 measured by the torque measuring device 35. <P>COPYRIGHT: (C)2012,JPO&INPIT |
