MEMS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technology that suppresses a warpage occurring in a movable electrode fixed to a movable mass body having a laminated structure.

SOLUTION: A micro-electromechanical system (MEMS) device includes: a substrate; the movable mass body that is formed by laminating a second conductive region on a first conductive region via a first insulating region and relatively movable to the substrate; an elastically supporting member for coupling the substrate with the movable mass body; a fixed electrode fixed to the substrate; the movable electrode fixed to the movable mass body and disposed opposite to the fixed electrode; and a reinforcing member that is formed by laminating a second conductive reinforcing region on a first conductive reinforcing region via an insulative reinforcing region and is fixed to the movable mass body, the reinforcing member supporting the movable mass electrode from at least both sides.

COPYRIGHT: (C)2012,JPO&INPIT