发明名称 OPTICAL FIBER AMPLIFIER, LIGHT SOURCE DEVICE, EXPOSURE DEVICE, OBJECT INSPECTION DEVICE, AND TREATMENT DEVICE
摘要 A polarization state adjusting optical element is formed by a ½ wavelength plate and a ¼ wavelength plate and its polarization direction and elliptic degree are adjusted. By adjusting the polarization state adjusting optical element in advance, even if the output of a pump light source is changed, the polarization characteristic (polarization direction and elliptic degree) of the output light of an FDFA amplifier will not change or the change is sufficiently small. In this state, a polarization state adjusting optical element adjusts the polarization state of the laser beam coming into a wavelength conversion optical system so that the wavelength conversion optical system has the maximum conversion efficiency. Thus, it is possible to provide an FDFA having a small change of the polarization state of the output light even if the pump light intensity is changed.
申请公布号 US2012242983(A1) 申请公布日期 2012.09.27
申请号 US201213487843 申请日期 2012.06.04
申请人 TOKUHISA AKIRA;NIKON CORPORATION 发明人 TOKUHISA AKIRA
分类号 H01S3/00;B01J19/12;G01N21/88;G03B27/42 主分类号 H01S3/00
代理机构 代理人
主权项
地址