发明名称 DIELECTRIC SPACER FOR DISPLAY DEVICES
摘要 <p>This disclosure provides systems, methods and apparatus for forming spacers on a substrate and building an electromechanical device over the spacers and the substrate. In one aspect, a raised anchor area is formed over the spacer by adding layers that result in a high point above the substrate. The high point can protect the movable sections of the MEMS device from contact with a backplate.</p>
申请公布号 WO2012129221(A1) 申请公布日期 2012.09.27
申请号 WO2012US29792 申请日期 2012.03.20
申请人 QUALCOMM MEMS TECHNOLOGIES, INC.;ZHONG, FAN;TAO, YI 发明人 ZHONG, FAN;TAO, YI
分类号 G02B26/00 主分类号 G02B26/00
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