发明名称 |
DIELECTRIC SPACER FOR DISPLAY DEVICES |
摘要 |
<p>This disclosure provides systems, methods and apparatus for forming spacers on a substrate and building an electromechanical device over the spacers and the substrate. In one aspect, a raised anchor area is formed over the spacer by adding layers that result in a high point above the substrate. The high point can protect the movable sections of the MEMS device from contact with a backplate.</p> |
申请公布号 |
WO2012129221(A1) |
申请公布日期 |
2012.09.27 |
申请号 |
WO2012US29792 |
申请日期 |
2012.03.20 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC.;ZHONG, FAN;TAO, YI |
发明人 |
ZHONG, FAN;TAO, YI |
分类号 |
G02B26/00 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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