| 摘要 |
<p>PURPOSE: A chemically amplified positive photo-sensitive composition for an organic insulator and a method for forming the organic insulator are provided to reduce the film reduction of a non-exposed part in the process of development. CONSTITUTION: A chemically amplified positive photo-sensitive composition for an organic insulator includes a binder resin. The binder resin includes a moiety containing an acid-labile protective group of a cyclic structure. The moiety is represented by chemical formula 1-1 or other chemical formulas. The binder resin includes polymers or copolymers containing the moiety. The average molecular weight of the binder resin is in a range between 2000 and 200000, and the distribution of molecular weight of the binder resin is in a range between 1 and 10.</p> |
